WebAn Oerlikon ClusterLine 200 II cluster tool, a fully-automated, computer-controlled system was used for this work. It comprised a central transfer module surrounded by two vacuum load locks and . Materials 2012, 5 577 four process modules; additional auxiliary modules performed alignment, wafer pre-heat and wafer WebThe Cutline Crew is a team of storytellers, brand builders and awareness drivers. We believe fiercely in our clients and each other.
Evatec LAYERS 4 2024-19 - Optoelectronics by …
WebCluSTErlINE® 200 II thE high volumE Production PlatForm oF choicE For highly SoPhiSticatEd and SPEcialiZEd aPPlicationS MAIN fEATurES high throughPut PlatForm For StatE-oF-thE-art Pvd, SoFt Etch and PEcvd aPPlicationS automatic WaFEr alignmEnt corrEction undEr vacuum SoPhiSticatEd ProcESS and auxiliary modulES aS WEll aS WebOct 3, 2013 · With the CLUSTERLINE ® 300, Oerlikon has successfully overcome the significant challenges associated with transitioning the manufacturing of power devices from 200mm to 300mm on thin wafers. martine cools
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